非接触式高精度表面轮廓仪由美国Chapman公司制造

• Non-contact scanning

• 0.01 nm height resolution

• 50 nm data sampling

• 0.50 µm lateral resolution

• Fast, complete circular scans (360^o around wafer surface)
• Nomarski Viewing System for high definition visual inspection
• Scan lengths ranging from µm to complete circumferences (200 or 300 mm wafer)
• Roughnessand waviness data from a single scan
• Non-contact 3D scans
• Automated sample positioning (X, Y, theta)
• Customized measurement sequences with multiple scans implemented with a single keystroke
• Automated focus acquisition
• Closed loop auto-focus system allows focus to be maintained while scanning oversamples with varying topography
• Optional robotic handling